| 品名/種類 | 圖片 | Parts Maker Tool Model | Module/Parts Number | 適用機台 | 庫存數量 |
| QUARTZ MICRO WAVE(QUARTZ WINDOW) |
| SumitomoMetal | 40-10-1006 | OZ4000 | 10 |
| REACTOR TAPER ANTI-DEPOSITION COVER |
| SumitomoMetal | 40-10-1007 | OZ4000 | 2 |
| EXHAUST PORT ANTI-DEPOSITION COVER |
| SumitomoMetal | 40-10-1008 | OZ4000 | 2 |
| ANTI-DEPOSITION COVER |
| SumitomoMetal | 40-10-1009 | OZ4000 | 2 |
| CM PORT ANTI-DEPOSITION COVER |
| SumitomoMetal | 40-10-1010 | OZ4000 | 3 |
| LIGHT PORT ANTI-DEPOSITION COVER |
| SumitomoMetal | 40-10-1011 | OZ4000 | 4 |
| REACTOR ANTI-DEPOSITION COVER |
| SumitomoMetal | 40-10-1012 | OZ4000 | 2 |
| WAFER HOLDER QUARTZ COVER |
| SumitomoMetal | 40-10-1013 | OZ4000 | 2 |
| QUARTZ ROD-716-S70389-001-01 |
| SumitomoMetal | 40-10-1014R | OZ4000 | 4 |
| PY2 QUARTZ ROD L61,P/N:B16-29620(SET/3EA |
| ANELVA | 40-19-0042 | I-2100SRE3CH | 6 |
| QUARTZ PLATE-1 P/N B12-02022 |
| ANELVA | 40-19-0044 | I-2100SRE3CH | 2 |
| QUARTZ PLATE-2 P/N B12-02031 |
| ANELVA | 40-19-0045 | I-2100SRE3CH | 1 |
| QUARTZ PLATE-3 P/N B12-02032 |
| ANELVA | 40-19-0046 | I-2100SRE3CH | 3 |
| PLATE FOR PY2 QUARTZ ROD L61(3EA/SET) |
| APPLIED | 40-19-0047 | CENTURAHT-POLY | 9 |
| IFB CHEMICAL FILTER/CT1380-002049-13 |
| TEL | 71-PE-0060 | MK-7 | 1 |
| RING CENTERING/ES1810-225117-11 |
| TEL | 72-EG-5070R | SCCM | 1 |
| PLATE,EXHAUST.(HARD-HP)/ES1810-121974-11 |
| TEL | 72-EG-5160R | SCCM | 1 |
| SCREW CAP M4*14 SUS304 /020-001093-1 |
| TEL | 72-EM-0110R | TE8400P | 20 |
| ANODE REMOVAL BLOT(40) /1810-425700-11 |
| TEL | 72-EM-0170R | TE8400P | 14 |
| HE LINE GASKET C /1810-426011-11(TEL) |
| TEL | 72-EM-0330 | TE8400P | 1 |
| SPEED CONTROLLER. /024-011358-1 |
| TEL | 72-EM-0340R | TE8400P | 9 |
| ISULATING PIPE,8K /810-321555-4 |
| TEL | 72-EM-0350R | TE8400P | 3 |
| CAPACITANCE MANOMETER/622A02TAE(MKS) |
| TEL | 72-EM-0380R | TE8400P | 2 |
| MICROWAVE OSCILLATOR /637-S004803-046 |
| SumitomoMetal | 72-EV-0010R | OZ4000 | 3 |
| HALOGEN LAMP/JCV-100V-100WGSN |
| SumitomoMetal | 72-EV-0120 | OZ4000 | 10 |
| HALOGEN LAMP /661-S7056-014-00 |
| SumitomoMetal | 72-EV-0120R | OZ4000 | 2 |
| THERMO COUPLE /E52-CA20A D=1 2M |
| SumitomoMetal | 72-EV-0190 | OZ4000 | 1 |
| THERMO COUPLE /666-S9039-015-00 |
| SumitomoMetal | 72-EV-0190R | OZ4000 | 1 |
| FIBER UNIT /667-S00461-009-00 |
| SumitomoMetal | 72-EV-0210R | OZ4000 | 2 |
| SIDE VIEW /667-S00465-005-00 |
| SumitomoMetal | 72-EV-0220 | OZ4000 | 2 |
| SENSOR AMP(KEYENCE,FS2)/667-S00462-002-0 |
| SumitomoMetal | 72-EV-0230R | OZ4000 | 2 |
| INSULATOR SPACER /713-S70892-001-00 |
| SumitomoMetal | 72-EV-0290R | OZ4000 | 4 |
| PIN PLATE /713-S70672-001-01 |
| SumitomoMetal | 72-EV-0300R | OZ4000 | 2 |
| INSULATED PLATE /713-S70912-001-00 |
| SumitomoMetal | 72-EV-0310R | OZ4000 | 4 |
| INSULATED BUSH /713-S70612-001-02 |
| SumitomoMetal | 72-EV-0320R | OZ4000 | 4 |
| CLAMPER GUIDE /713-S070788-001-02 |
| SumitomoMetal | 72-EV-0330 | OZ4000 | 2 |
| BOLT CAP /713-S070720-001 |
| SumitomoMetal | 72-EV-0350 | OZ4000 | 16 |
| PIRANI PORT COVER /714-S070330-001-02 |
| SumitomoMetal | 72-EV-0370 | OZ4000 | 2 |
| ROUGH VALVEPORT COVER/714-S070332-001-02 |
| SumitomoMetal | 72-EV-0380 | OZ4000 | 2 |
| EXHAUST PORT COVER /714-S73201-001-01 |
| SumitomoMetal | 72-EV-0390 | OZ4000 | 1 |
| SCREW.GAS RING /715-S70161-001-00 |
| SumitomoMetal | 72-EV-0440R | OZ4000 | 12 |
| BELT HEATER /678-S007320-008 |
| SumitomoMetal | 72-EV-0450 | OZ4000 | 2 |
| BELL-JAR PLATE /716-Y070158-014-G1 |
| SumitomoMetal | 72-EV-0461 | OZ4000 | 1 |
| CAPACTTANCE MANOMETER /CMH4-M11-S06 |
| SumitomoMetal | 72-EV-0470R | OZ4000 | 1 |
| SUPER KNOB /790-S009024-018(SUMITOMO) |
| SumitomoMetal | 72-EV-0490 | OZ4000 | 14 |
| SCREW,HEXA-SOCKET HEAD CAP(SUMITOMO) |
| SumitomoMetal | 72-EV-0510 | OZ4000 | 8 |
| SCREW,HEXA-SOCKET HEAD CAP (SUMITOMO) |
| SumitomoMetal | 72-EV-0520 | OZ4000 | 8 |
| ESC HOLDER /716-S070957-001 |
| SumitomoMetal | 72-EV-0530 | OZ4000 | 1 |
| ESC HOLDER /716-S70957-001-E1 |
| SumitomoMetal | 72-EV-0530R | OZ4000 | 1 |
| CLAMPER PIN /716-S070768-002-01 |
| SumitomoMetal | 72-EV-0540 | OZ4000 | 4 |
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