| 品名 | 機台廠牌 | 機台型號 | 用途說明 |
| FT-750 LAMP | KLA(美商科磊) | FT-750 | For THK measurement |
| Retainer ring | EBARA CMP Treatment | F-REX200/EPO-223 | CMP Wafer retainer ring |
| Guide ring | EBARA CMP Treatment | F-REX200/EPO-223 | GUIDE RING 8-46 /CEPOTR-8011142 |
| Real time flow monitor | EBARA CMP Treatment | F-REX200/EPO-223 | Flow fault interlock |
| Spring tube cable | TEL-I-line Track | Mark 7,8,ACT8 | Main Arm Spring tube cable/CT1987-411444-11 |
| Real time flow monitor | TEL-I-line Track | Mark 7,8,ACT8 | Flow fault interlock |
| 插銷組 | Inline (NIKON) | 5X-I Line | 固定wafer chuck 所使用插銷pin |
| 厚薄墊片組 | Inline (NIKON) | 5X-I Line | Robot 高度校正使用 |
| 拆除Stage 治工具 | Inline (NIKON) | 5X-I Line | Remove /Instal stage tool |
| Driver shaft tool | Ion Implanter (HC)/VARIAN | VISION80 | Remove /Instal Driver shaft 治具 |
| Diag 測試板 | 電性量測儀 (TEL F*_WET) | Wet | 測試Probe 電性量測功能 |
| Laser aligment tool set | KLA stress and RS measure | FX-5400 | Calibrate laser path |
| Getting reticle tool | Brooks reticle stocker | * | 藉由機台的結構來設計提高手動拿取 reticle 穩定性 |
| Laser calibration tool | KLA Defect check | KLA2365 | Calibrate laser path |
| Auto mask box transfer | Maxchip | MBT001 | Vendor and Nikon box 自動轉換機 |
| 4",8"10" driver shaft clamp | Nisshin Denki Ion Implanter (MC) | I-2100 SRE 3CH | 4"、8"、10" driver shaft 磁性流體測漏盲封 |
| DDRA-拆掉工具 | KLA Stress and RS measure | RS-35 | Remove /Instal DDRA 治具 |
| 傘形齒輪 | HITACHI CD SEM | S8820 | 機構傳動使用，原廠不單賣故委托製作。 |
| Track 量測熱盤治工具 | TEL-I-line Track | Mark 7,8,ACT8 | 用於 track 量測熱盤溫度等殊治具 |
| Wafer GUIDE(L&R) | TEL-I-line Track | Mark 7,8,ACT8 | 使用於 MK-7 track 機台 C/S arm，從 cassette 抽片出來後固定 wafer 的檔塊。 |
| Nikon AMP singal cable | Inline (NIKON) | 5X-I Line | 讀取 AMP singal 特規 cable |
| UTC-200 Turn over unit | MECS | UTC-200 | 反轉晶片裝置、馬達、機構、Sensor |
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